Comparison of acid generation in EUV lithography films of poly (4-hydroxystyrene) (PHS) and noria adamantyl ester (noria-AD50)
journal contribution
posted on 2024-11-07, 19:53 authored by W. Wu, K. Nuzhdin, M. Vyushkova, I. Janik, D. M. BartelsNone Given
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2012Extent
Page 6215-6224Publisher
J. Phys. Chem. BSource
Volume 116Usage metrics
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