Compositionally graded heterojunction semiconductor device and method of making same

A compositionally graded semiconductor device and a method of making same are disclosed that provides an efficient p-type doping for wide bandgap semiconductors by exploiting electronic polarization within the crystalline lattice. The compositional graded semiconductor graded device includes a graded heterojunction interface that exhibits a 3D bound polarization-induced sheet charge that spreads in accordance with .rho..sub..pi.(z)=-.gradient.P(z), where .rho..sub..pi.(z) is a volume charge density in a polar (z) direction, and .gradient. is a divergence operator, wherein the graded heterojunction interface is configured to exhibit substantially equivalent conductivities along both lateral and vertical directions relative to the graded heterojunction interface.