Chemical Mechanical Polishing of Gold

thesis

posted on 2013-03-05, 00:00 authored by Golnaz Karbasian

This thesis presents a set of experiments dedicated to finding a reliable gold CMP process with satisfactory and reproducible results.

History

Date Modified

2017-06-05

Research Director(s)

Gregory L. Snider

Committee Members

Gregory L. Snider Alan Seabaugh Gary H. Bernstein Alexei Orlov

Degree

Master of Science in Electrical Engineering

Degree Level

Master's Thesis

Language

English

Alternate Identifier

etd-03052013-115532

Publisher

University of Notre Dame

Additional Groups

Electrical Engineering

Program Name

Electrical Engineering

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Keywords

Chemical mechanical polishing surfactants

Licence

All Rights Reserved

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