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Redesign and Refurbishment of a III-V Compound Semiconductor Wet Oxidation System

thesis
posted on 2004-04-16, 00:00 authored by Nathaniel Charles Crain
The III-V compound semiconductoir wet oxidation system for the Nanofabrication Laboratory at the University of Notre Dame has undergone an extensive redesign and rebuild. Improvements to the various subsystems are described in detail followed by processing techniques and concluded with a set of standard oxidations.

History

Date Created

2004-04-16

Date Modified

2018-10-04

Research Director(s)

Dr. Douglas C. Hall

Committee Members

Dr. Thomas H. Kosel Dr. Gregory Snider

Degree

  • Master of Science in Electrical Engineering

Degree Level

  • Master's Thesis

Language

  • English

Alternate Identifier

etd-04162004-140016

Publisher

University of Notre Dame

Additional Groups

  • Electrical Engineering

Program Name

  • Electrical Engineering

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    Masters Theses

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    Keywords

    compound semiconductorwet oxidation furnace

    Licence

    All Rights Reserved

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