Integrated Imaging Facility

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  Article

  Cavity-Backed Antenna-Coupled Nanothermocouples
  

  Author(s):

  Gergo Szakmany, Alexei Orlov, Gary Bernstein, Wolfgang Porod

  Abstract:

  This paper reports a two-orders-of-magnitude improvement in the sensitivity of antenna-coupled nanothermocouple (ACNTC) infrared detectors. The electrical signal generated by on-chip ACNTCs results from the temperature difference between a resonant antenna locally heated by infrared radiation and the substrate. A cavity etched under the antenna provides two benefits. It eliminates the undesirable cooling of the hot junction by thermally isolating the antenna from the substrate. More important…

  Date Published:

  2019-07