Articles & Publications

Search CurateND

Search criteria:

Type of Work: Article remove ×
Clear all

List of files deposited in CurateND that match your search criteria

  • Author(s):
    Jin Qin, Edward Kinzel, Liang Wang
    Abstract:

    In this article, we demonstrate a specially designed resonant metamaterial with epsilon-near-zero (ENZ) and nanoantenna to enhance the exposure depth in plasmonic direct writing lithography more than 10 times. The ENZ metamaterial composed of a Ag/Si3N4 multilayer thin film, converts the evanescent field generated by the bowtie aperture nanoantenna to propagating waves with low divergence and high collimation. Deep sub-diffraction limited resolution of less than 65 nm (λ/7) with exposure dept…

    Date Published:
    2019-08