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  • Author(s):
    Gergo Szakmany, Alexei Orlov, Gary Bernstein, Wolfgang Porod
    Abstract:

    This paper reports a two-orders-of-magnitude improvement in the sensitivity of antenna-coupled nanothermocouple (ACNTC) infrared detectors. The electrical signal generated by on-chip ACNTCs results from the temperature difference between a resonant antenna locally heated by infrared radiation and the substrate. A cavity etched under the antenna provides two benefits. It eliminates the undesirable cooling of the hot junction by thermally isolating the antenna from the substrate. More important…

    Date Published:
    2019-07