Thin-Film Processing Routes for Combinatorial Materials -- A Review

Article

Abstract

High-throughput combinatorial investigations are transforming materials discovery, phase diagram development, and processing optimization. Thin-film deposition techniques are frequently used to fabricate sample libraries employed in these studies. Various adaptations of well-known thin-film chemical vapor deposition (CVD) and physical vapor deposition (PVD) techniques utilized for the synthesis of inorganic combinatorial thin-film materials libraries are reviewed, with novel processing approaches being highlighted. Methods for developing gradients in composition of other film properties are described. Issues and considerations specific to thin-film processing of combinatorial materials libraries are discussed, with some emphasis on catalytic applications.

Attributes

Attribute NameValues
Creator
  • P. J. McGinn

Journal or Work Title
  • ACS Combinatorial Science

Volume
  • 21

First Page
  • 501

Last Page
  • 515

ISSN
  • 21568944

Publication Date
  • 2019-06

Subject
  • Titan TEM

Publisher
  • American Chemical Society

Date Created
  • 2019-08-15

Language
  • English

Departments and Units
Record Visibility and Access Public
Content License
  • All rights reserved

Digital Object Identifier

doi:10.1021/acscombsci.9b00032

This DOI is the best way to cite this article.