University of Notre Dame
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Chemical Mechanical Polishing of Gold

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thesis
posted on 2013-03-05, 00:00 authored by Golnaz Karbasian
This thesis presents a set of experiments dedicated to finding a reliable gold CMP process with satisfactory and reproducible results.

History

Date Modified

2017-06-05

Research Director(s)

Gregory L. Snider

Committee Members

Gregory L. Snider Alan Seabaugh Gary H. Bernstein Alexei Orlov

Degree

  • Master of Science in Electrical Engineering

Degree Level

  • Master's Thesis

Language

  • English

Alternate Identifier

etd-03052013-115532

Publisher

University of Notre Dame

Program Name

  • Electrical Engineering

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    Masters Theses

    Categories

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    Keywords

    Chemical mechanical polishingsurfactants

    Licence

    All Rights Reserved

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