Chemical Mechanical Polishing of Gold

Master's Thesis

Abstract

This thesis presents a set of experiments dedicated to finding a reliable gold CMP process with satisfactory and reproducible results.

Attributes

Attribute NameValues
URN
  • etd-03052013-115532

Author Golnaz Karbasian
Advisor Gregory L. Snider
Contributor Gregory L. Snider, Committee Member
Contributor Alan Seabaugh, Committee Member
Contributor Gary H. Bernstein, Committee Member
Contributor Alexei Orlov, Committee Member
Degree Level Master's Thesis
Degree Discipline Electrical Engineering
Degree Name MSEE
Defense Date
  • 2012-11-20

Submission Date 2013-03-05
Country
  • United States of America

Subject
  • Chemical mechanical polishing

  • surfactants

Publisher
  • University of Notre Dame

Language
  • English

Record Visibility Public
Content License
  • All rights reserved

Departments and Units

Files

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