Cavity-Backed Antenna-Coupled Nanothermocouples

Article

Abstract

This paper reports a two-orders-of-magnitude improvement in the sensitivity of antenna-coupled nanothermocouple (ACNTC) infrared detectors. The electrical signal generated by on-chip ACNTCs results from the temperature difference between a resonant antenna locally heated by infrared radiation and the substrate. A cavity etched under the antenna provides two benefits. It eliminates the undesirable cooling of the hot junction by thermally isolating the antenna from the substrate. More importantly, careful cavity design results in constructive interference of the incident radiation reflected back to the antenna, which significantly increases the detector sensitivity. We present the cavity-depth-dependent response of ACNTCs with cavity depths between 1 μm and 22 μm. When constructive interference is maximized, the thermal response increases by 100-fold compared to devices without the cavity.

Attributes

Attribute NameValues
Creator
  • Gergo Szakmany

  • Alexei Orlov

  • Gary Bernstein

  • Wolfgang Porod

Journal or Work Title
  • Nature Scientific Reports

Volume
  • 9

First Page
  • 1

Last Page
  • 7

ISSN
  • 2045-2322

ISBN
  • 4159801946072

Publication Date
  • 2019-07

Subject
  • Helios FIB

Publisher
  • Nature

Date Created
  • 2019-10-09

Language
  • English

Departments and Units
Record Visibility and Access Public
Content License
  • All rights reserved

Digital Object Identifier

doi:10.1038/s41598-019-46072-4

This DOI is the best way to cite this article.