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Group III-nitride compound heterojunction tunnel field-effect transistors and methods for making the same

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posted on 2018-08-07, 00:00 authored by Debdeep Jena, Patrick Fay, Wenjun Li
A tunnel field-effect transistor device includes a p-type GaN source layer, an n-type GaN drain layer, and an interlayer interfaced between the source-layer and the drain layer. In one example, the interlayer includes an Indium Nitride (InN) layer. In one example, the interlayer includes a graded Indium gallium nitride layer and an InN layer. In one example, the interlayer may include a graded Indium gallium nitride (In.sub.xGa.sub.1-xN) layer and an Indium gallium nitride (InGaN) layer. In one example, the tunnel field-effect transistor device includes an in-line configuration. In one example, the tunnel field-effect transistor device includes a side-wall configuration.

History

Patent Number

US 9905647 B2

Other Application

14/925,542

Inventor

Patrick Fay Wenjun Li Debdeep Jena

Inventor from Local Institution

Patrick Fay Wenjun Li Debdeep Jena

Assignee

University of Notre Dame Du Lac

Date Modified

2018-08-07

Language

  • English

Claims

8

Prior Publication Number

US 20170125521 A1

Publisher

U.S. Patent and Trademark Office

Cooperative Patent Classification Codes

H01L 29/0895 (20130101); H01L 29/78 (20130101); H01L 29/78681 (20130101); H01L 29/78618 (20130101); H01L 29/66977 (20130101); H01L 29/66742 (20130101); H01L 29/78696 (20130101); H01L 29/42392 (20130101); H01L 29/205 (20130101); H01L 29/0669 (20130101); H01L 29/66522 (20130101); H01L 29/42356 (20130101); H01L 29/7391 (20130101); H01L 29/2003 (20130101); H01L 29/083 (20130101); H01L 29/517 (20130101)

Contributor

Patrick Fay|Wenjun Li|Debdeep Jena

International Patent Classification Codes

H01L 29/78 (20060101); H01L 29/20 (20060101); H01L 29/08 (20060101)

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